Technical data
Cartridges
| TURBOVAC 90/30/10 iC | TURBOVAC 250-100 iC | TURBOVAC 350/300/50 iC | TURBOVAC 400/300/60 iC | |
| Flange Dimensions (mm) | ||||
| High vacuum connection HV | ø81 | ø105 | ø144 | ø144 |
| Intermediate stage IS1 | ø100 x 18 | ø124 x 19.8 | ø159.6 x 44 | ø159.6 x 44 |
| Intermediate stage IS2 | ø108.5 x 11.5 | n/a | ø167.6 x 20 | ø167.6 x 20 |
| Flange (out) FV | DN16 ISO-KF | DN16 ISO-KF | DN25 ISO-KF | DN25 ISO-KF |
| Rotation speed ±2% | 1200 Hz | 1200 Hz | 1000 Hz | 1000 Hz |
| Pumping Speed (l/s) | ||||
| N2on HV | 90 | 250 | 350 | 400 |
| He on HV | 90 | 250 | 350 | 400 |
| N2 on IS1 | 30 | 100 | 250 | 300 |
| He on IS1 | 30 | 50 | 250 | 300 |
| N2 on IS2 | 10 | n/a | 50 | 60 |
| He on IS2 | 10 | n/a | 40 | 50 |
| Gas throughput at full rotation speed (mbarl/s) | ||||
| N2 on HV | 3 | 6 | 4 | 4 |
| N2 on IS1 | 3 | 6 | 4 | 4 |
| N2 on IS2 | 3 | n/a | 6 | 8 |
| Compression ratio (at no flow) | ||||
| N2 (H1/H) | 3.4 x 103 | 8.0 x 103 | 4.0 x 107 | 3.0 x 104 |
| N2 (H2/H1) | 6.0 x 102 | n/a | 3.0 x 103 | 3.0 x 103 |
| N2 (FV/H2) | 2.0 x 106 | 3.0 x 109 | 9.0 x 104 | 8.0 x 104 |
| N2 (FV/H) | 1.0 x 1011 | 1.0 x 1011 | 1.0 x 1011 | 1.0 x 1011 |
| He (H1/H) | 2.2 x 101 | 3.5 x 101 | 1.0 x 103 | 6.0 x 101 |
| He (H2/H1) | 1.4 x 101 | n/a | 0.3 x 101 | 2.5 x 101 |
| He (FV/H2) | 1.3 x 103 | 2.4 x 104 | 7.0 x 102 | 4.0 x 102 |
| He (FV/H) | 4.2 x 105 | 8.0 x 105 | 2.0 x 107 | 6.0 x 105 |
| Fore-vacuum pressure max. (mbar) | ||||
| N2 on FV | n/a | 14 | 10 | 10 |
| Weight (kg) | 3.1 | 3.8 | 8 | 7.7 |
MI-Pumps
| TURBOVAC 90/10/10 i | TURBOVAC 90-30 i | TURBOVAC 90/30/10 i | |
| Flange Dimensions (mm) | |||
| High vacuum connection HV | 28 x 10 | 62 x 47.5 | 72 x 47.5 |
| Intermediate stage IS1 | 28 x 5 | 65 x 17.5 | 72 x 17.5 |
| Intermediate stage IS2 | 28 x 5 | n/a | 62 x 12.1 |
| Flange (out) FV | Hose OD ø18.7 with O-ring | DN16 ISO-KF | DN16 ISO-KF |
| Rotation speed ±2% | 1200 Hz | 1200 Hz | 1200 Hz |
| Pumping Speed (l/s) | |||
| N2 on HV | 90 | 90 | 250 |
| He on HV | 90 | 90 | 250 |
| N2 on IS1 | 10 | 30 | 100 |
| He on IS1 | 10 | 30 | 50 |
| N2 on IS2 | 10 | n/a | n/a |
| He on IS2 | 10 | n/a | n/a |
| Gas throughput at full rotation speed (mbarl/s) | |||
| N2 on HV | 3 | 3 | 3 |
| N2 on IS1 | 3 | 3 | 3 |
| N2 on IS2 | 3 | n/a | 3 |
| Compression ratio (at no flow) | |||
| N2 (H1/H) | 2.5 x 103 | 2.0 x 102 | 3.4 x 103 |
| N2 (H2/H1) | 1.0 x 103 | n/a | 6.0 x 102 |
| N2 (FV/H2) | 5.0 x 104 | 3.0 x 107 | 2.0 x 106 |
| N2 (FV/H) | > 1.0 x 1011 | 6.0 x 109 | > 1.0 x 101 |
| He (H1/H) | 4.0 x 104 | 0.7 x 101 | 2.2 x 101 |
| He (H2/H1) | 1.0 x 103 | n/a | 1.4 x 101 |
| He (FV/H2) | 4.0 x 102 | 3.7 x 103 | 1.3 x 103 |
| He (FV/H) | 5.0 x 106 | 2.7 x 104 | 4.2 x 105 |
| Fore-vacuum pressure max. (mbar) | |||
| N2 on FV | 15 | 14 | n/a |
| Weight (kg) | 4.2 | 4.7 | 4.7 |
System
| TURBOVAC 250/100 HV system | TURBOVAC 300/250/30 HV system /DN100 | TURBOVAC 400/300/60 HV system /Standard | |
| Flange Dimensions (mm) | |||
| High vacuum connection HV | 110 x 100 | DN100 CF / ø102 | 132 x 93.5 |
| Intermediate stage IS1 | 100 x 32.5 | DN100 CF / ø102 | 132 x 76.5 |
| Intermediate stage IS2 | n/a | DN25 ISO-KF | 132 x 24.5 |
| Flange (out) FV | DN16 ISO-KF | DN25 ISO-KF | DN25 ISO-KF |
| Rotation speed ±2% | 1200 Hz | 1000 Hz | 1000 Hz |
| Pumping Speed (l/s) | |||
| N2 on HV | 250 | 300 | 400 |
| He on HV | 250 | 300 | 400 |
| N2 on IS1 | 100 | 250 | 300 |
| He on IS1 | 50 | 250 | 300 |
| N2 on IS2 | n/a | 30 | 60 |
| He on IS2 | n/a | 30 | 50 |
| Gas throughput at full rotation speed (mbarl/s) | |||
| N2 on HV | n/a | 4 | 4 |
| N2 on IS1 | n/a | 4 | 4 |
| N2 on IS2 | n/a | 8 | 8 |
| Compression ratio (at no flow) | |||
| N2 (H1/H) | 3.5 x 102 | 3.0 x 104 | 3.0 x 104 |
| N2 (H2/H1) | n/a | 3.0 x 103 | 3.0 x 103 |
| N2 (FV/H2) | 3.0 x 109 | 8.0 x 104 | 8.0 x 104 |
| N2 (FV/H) | > 1.0 x 1011 | > 1.0 x 1011 | > 1.0 x 1011 |
| He (H1/H) | 1 x 101 | 6.0 x 101 | 6.0 x 101 |
| He (H12/H1) | n/a | 2.5 x 101 | 2.5 x 101 |
| He (FV/H2) | 2.4 x 104 | 4.0 x 102 | 4.0 x 102 |
| He (FV/H) | 2.4 x 105 | 6.0 x 105 | 6.0 x 105 |
| Fore-vacuum pressure max. (mbar) | |||
| N2 on FV | 14 | 10 | 10 |
| Weight (kg) | 8.3 | 17.5 | 15.6 |
H: main inlet | H1: first interstage | H2: second interstage | FV: fore-vacuum
