A comprehensive product program

A range of special valves for the most varied of applications. vacuum pumps without a built-in inlet valve.

Small Micro Valves and Special valves

Drive types

  • Pneumatic
  • Electropneumatic
  • Electromagnetic

    Casing types
  • Right-angle valve
  • Straight-through valve (electromagnetic only)

    Accessories
  • Adapter (DN 10 ISO-KF flange, ¼” pipe, 6 mm pipe)

Small Micro Valves

The “micro” range of valves is the space saving and efficient solution in a compact size. Various optional connecting adapters guarantee the highest degree of flexibility during system integration.

Your Benefits

  • Compact construction
  • High conductance at the molecular level
  • Long service life at > 2 million switching cycles
  • High switching frequency
  • Protection class IP 65
  • High flexibility of installation

Special Valves

  • Pressure relief valves DN 16 ISO-KF
  • Power failure venting valves DN 10 ISO-KF
  • Coarse variable leak valves with or without isolation valve DN 10/16 ISO-KF
  • Venting valves DN 10 ISO-KF
  • Vacuum locks (DN 16 to DN 40 ISO-KF)
  • Sealing valves (DN 16 to DN 40 ISO-KF)
  • Ball valves (DN 16 to DN 40 ISO-KF)
  • UHV valves (DN 16 to 63 CF)
  • Purge gas and venting valves for turbomolecular pumps