COOLVAC e – Technical data
Technical data
| COOLVAC 1500 | COOLVAC 2000 | COOLVAC 3000 | COOLVAC 5000 | COOLVAC 10000 | COOLVAC 18000 | COOLVAC 30000 | COOLVAC 60000 | ||
| Cold head | 7/25e | 7/25e | 7/25e | 5/100e | 5/100e | 2x 5/100e | 2x 5/100e- 140e | 2x 5/100e – 2x 140e | |
| Cooldown time | min | 60 | 70 | 120 | 100 | 150 | 180 | 260 | 330 |
| Cross over value | mbar*l | 210 | 250 | 500 | 700 | 800 | 800 | 1200 | 1000 |
| Pumping speed | |||||||||
| N₂ | l/s | 1,500 | 2100 | 3000 | 5,200 | 10,000 | 18,000 | 30,000 | 57,000 |
| H₂O | l/s | 4,600 | 7000 | 10500 | 18,000 | 30,000 | 46,000 | 93,000 | 180,000 |
| Ar | 1200 | 1600 | 2500 | 4,000 | 8,400 | 13,500 | 25,000 | 47,000 | |
| H₂ | 2500 | 3200 | 6000 | 6,200 | 10,000 | 14,000 | 30,000 | 60,000 | |
| Capacity | |||||||||
| Ar/N₂ | bar*l | 1000 | 1600 | 2500 | 3,000 | 5,500 | 6,000 | 6,500 | 9,000 |
| H₂ @ 10⁻⁶ mbar | 15 | 15 | 28 | 32 | 45 | 65 | 100 | 150 | |
| Maximum volume flow rate | |||||||||
| Ar/N₂ | mbar*l*s | 12 | 12 | 15 | 10 | 10 | 14 | 14 | 25 |
| H₂ | 3 | 6 | 10 | 7 | 7 | 7 | 7 | 12 | |
| Weight | |||||||||
| iSmart Line | kg | 25 | 29 | 46 | 53 | 70 | 131 | 258 | 500 |
| iBasic Line | 25 | 25 | 35 | 44 | 63 | 123 | 246 | 450 | |
- w = 0 eSL, 1 eBL, 3 eLN2
- x,y = customer specific variants – UHV variants
- z = different flanges
Contact Leybold application management for further information
