Three main variants… out of 576 possible variants!
Fully in-house manufactured, 100% accurate.
Let us know what your requirements are: we will together define the perfectly matching TWISTER™
(Dimensions in mm)
Basic substrate stage
Options
- Rotational speed: 20 rpm
- Substrate heating: 400 °C
- No cooling
- Manual clamping
- No zero-positioning
- No Z-lift for load lock
Advanced substrage stage
Options
- Rotational speed: 20 rpm
- Substrate heating: 400 °C
- Cooling media: water
- Clamping: 20mm pneumatic
- Zero-positioning: yes
- No Z-lift for load lock
Full featured substrate stage
Options
- Rotational speed: 20 rpm
- Substrate heating: 400 °C
- Cooling media: water
- Clamping: 20mm pneumatic
- Zero-positioning: yes
- Z-lift for load lock: 150 mm
