Research and Development made easy
At Leybold we have over 50 years experience in coating systems. The UNIVEX systems are a well known legacy, bringing high quality coatings to our research and development customers.
For high-quality coatings: clean vacuum, coating sources and substrate handling are essential.
The fully in-house manufactured TWISTER™ substrate stage is the next step to integrate innovative, robust, and reliable technology into your UNIVEX system or any other coating chamber you may be operating already.
Tailored solutions for specific applications
In order to ensure a successful and reproducible coating process, we developed a turnable, heatable substrate stage allowing great homogeneities and coating quality.
In order to meet your different needs, we offer a modular system that consists of three main versions:
- Basic
- Advanced
- Full featured
Precise handling for accurate results
- Uniform and homogeneous thin films thanks to accurate rotating of the substrate
- Optional Z-shift to adjust the substrate’s distance to the coating sources and for load lock handovers
- Flexibility of the substrate plates with diameters of up to 6 inches
- Improved layer quality by heating up to 400 °C
- Optional water cooling:
– Protects sensitive substrates like foils and OLED materials
– Quicker cooldown and subsequent processing - Easily exchangeable coating shield for cleaning
- Included position control
- Possible upgrade of most existing lab coating devices
