Fully in-house manufactured, 100% accurate.

The fully in-house manufactured TWISTER™ substrate stage is the next step to integrate innovative, robust, and reliable technology into your UNIVEX system or any other coating chamber you may be operating already.

Fully tested, with CE declaration of conformity.

The substrate stage is an entirely tested solution to match your needs.
Well integrated in our software it can be run completely automated – for example in combination with a load lock.
Incremental motors can also easily be integrated into your PLCs.

Modular system

Based on its modular principle, the TWISTER™ substrate stage is a typical upgradable device which only requires additional pneumatic clamps in case a load lock is added. If cooling is needed, just exchange the heating plate with a combined heating + cooling plate.

  1. Encoder motor straight or with 90° gear
  2. Z-Shift module (optional)
  3. Ferrofluidic feedthrough
  4. Stainless steel flange DN 200, 250, 320 ISO-K
  5. Heating plate / Cooling plate / Heating + cooling plate
  6. Pneumatic or manual substrate fixing