Technical features
Combination options
| Substrate | Flange ISO-K | Heating | Cooling media | Clamping | Water block | Electric slipring | Positioning | Motor configuration | Z-lift |
| Size of substrate / substrate holder |
Connection flange |
Heating plate up to 400°C |
For temperature sensible substrates and cooldown |
Automatic pneumatic clamping or manual spring clamps |
Needed for water cooling |
Needed for heating |
Needed for precise positioning |
Gear to reduce installation height |
Changes the substrate position by 150 mm |
| 4 inch / 6 inch | DN 320 / DN 250 / DN 200 | yes / no | with water cooling / without cooling | pneumatic / manual / no clamping | yes / no | yes / no | yes / no | angle / straight | yes / no |
Thanks to its modularity: it is possible to retrofit your TWISTER™ substrate stage later without the need of purchasing a completely new one.
If a load lock is installed, just add pneumatic clamps.
If cooling is required just change the shaft and add the new plate.
Technical data at a glance
| Technical data | |
| Flange | Stainless steel DN 200 / 250 / 320 |
| Substrate size | Up to 6 inches |
| Weight | Max. 1000 g |
| Substrate thickness | 1-3 mm |
| Rotational speed | Up to 20 rpm |
| Positioning accuracy | +/- 0,1 degree |
| Speed and position control | Encoder |
| Fixing | Pneumatic or manual |
| Leak tightness | < 1 x 10-8 mbar x l/s |
| Feedthroughs | |
| Mechanical | Ferrofluidic |
| Electrical | 6 connectors, heater current (20A, max 1 kW), 1 Pt100 |
| Options | |
| Heater | 48 V, 1 kW |
| Temperature range | Adjustable from 20 °C up to 400 °C |
| Substrate cooling | Cooling water |
With the modular building block system different featured variants can be combined.
